model c20s - compact parylene treatment machine

modèle c20s construction

Very easy to use and maintain

Ideal for lab tests, prototypes, and small runs

Economical use of parylene thanks to the small deposition chamber

Perfectly suited for treating wafers up
to 150 mm in diameter

Pump protected by a liquid nitrogen
cryogenic trap

Overall dimensions:
L x W x H 1180 x 500 x 750 mm
Chamber: ∅ 200 x L 210 mm Tooling: ∅ 170 x L 188 mm Voltage: 400 VAC 3 ph + N + PE Frequency / power: 50 Hz / 3,5 kW Control voltage: 24 VDC Dimer load capacity: 30 g Pumping volume: 12 - 25 m3/h Weight: 90 kg Table size (option):
L x W x H 1300 x 600 x 800 mm
CE comelec certified
C20S comelec

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