|
|
 |
|
|
|
|
|
 |
 |
|
|
|
|
Model |
C50S |
C50T |
C22T |
|
Chamber material |
Inox 316L |
Inox 316L |
Quartz |
|
Usable chamber dimensions |
 400 |
300 |
200, 150, 90 |
|
|
L 550-900 |
L 750 |
L 500, 200, 200 |
|
Vacuum |
x 10-3 mBar |
x 10-3 mBar |
x 10-3 mBar |
|
Cooling system |
LN2 |
LN2 |
Mechanical cooler |
|
Electrical power |
400 V 50 Hz |
400 V 50 Hz |
400 V 50 Hz |
|
|
3ph + N + PE |
3ph + N + PE |
3ph + N + P |
|
Current |
3 x 12 A |
3 x 12 A |
3 x 12 A |
|
|
|
|
|
|
Consumption |
9 KW |
9 KW |
9 KW |
|
Tension de contrôle |
230 VAC |
230 VAC |
230 VAC |
|
Electrical control |
24 VDC |
24 VDC |
24 VD |
|
Outside dimension |
2500 x 1100 |
3000 x 1200 |
2400 x 1020 |
|
|
h 1500 |
h 1500 |
h 1400 |
|
Weight |
400 Kg |
420 Kg |
360 Kg |
|
|
|
|
|
|
Options : |
- Mechanical cooler
- Chamber extension
- Chart recorder |
- Deposition parameter
control directly on PC |
- Made-to-measure chamber,
according to specifications |
|
|
|
|
|
|
|
|
|
  |
|
 |
 |
|
